Inner reticle pod cover and baseplate shipper

Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a base...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GLYNN, PHILIP STUART, TIEBEN, ANTHONY MATHIUS, RASCHKE, RUSS V
Format: Patent
Sprache:chi ; eng
Schlagworte:
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