Inner reticle pod cover and baseplate shipper

Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a base...

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Hauptverfasser: GLYNN, PHILIP STUART, TIEBEN, ANTHONY MATHIUS, RASCHKE, RUSS V
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creator GLYNN, PHILIP STUART
TIEBEN, ANTHONY MATHIUS
RASCHKE, RUSS V
description Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a baseplate of a reticle pod, and the fixing features engage the cover or baseplate to prevent movement of the cover or baseplate in directions in plane with the first or second shells. The fixing features can be such that there are both rigid and elastic fixing features contacting the cover or baseplate. A method of storing a cover or baseplate can include placing the cover or baseplate between first and second shells and joining the first and second shells to one another.
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language chi ; eng
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subjects ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS
CONVEYING
ELECTROGRAPHY
HANDLING THIN OR FILAMENTARY MATERIAL
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PACKAGES
PACKAGING ELEMENTS
PACKING
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
STORING
TRANSPORTING
title Inner reticle pod cover and baseplate shipper
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