Equipment front end modules with induced gas mixing, and methods of use thereof

An equipment front end module (EFEM) having walls, a first wall including one or more load ports and an EFEM chamber formed between the walls. The EFEM further includes an upper plenum at a top of the EFEM and including an opening into the EFEM chamber. Ducts provide a return gas flow path enabling...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TINDEL, STEVEN TREY, REUTER, PAUL BENJAMIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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