Rotor cap for turbomolecular vacuum pump

A rotor cap for a turbo molecular vacuum pump is disclosed. The rotor cap comprises a cover element and a connection element, wherein the side wall and the top surface of the cover element are curved smoothly, and the connection element comprises an extension rod and a hardness and weight adjusting...

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Bibliographische Detailangaben
Hauptverfasser: CHEN, CHIEN-HSUN, SUN, SHIH-YUAN, FANG, CHIHIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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