Modulating thermal conductivity to control cooling of showerhead

A cooling plate for a showerhead in a substrate processing system includes a first portion that defines a first path through the cooling plate. The first portion includes a first inlet configured to receive flow of a first fluid and a first outlet in fluid communication with the first inlet. The fir...

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Bibliographische Detailangaben

Hauptverfasser:	ALEXY, JOHN B, RAJEEV, RAHUL, NARENDRNATH, KADTHALA R, GOMM, TROY
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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