Optical system for shape measuring device

This optical system for a shape measuring device comprises a parallel light irradiation system and an imaging optical system. The parallel light irradiation system includes: a point light source; a collimator lens; and a telecentric lens having a telecentric structure on both sides or the object sid...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAWARADA, TAKAO, FURUTA, YOHEI, NISHIYAMA, KOHEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING
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