Prober having independent modular cell structure

Disclosed is a prober having an independent modular cell structure. The prober having an independent modular cell structure according to one embodiment of the present invention may comprise: a prober stage chamber module to which a probe card and a wafer are supplied and in which the probe card and...

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Hauptverfasser:	SHIN, KI-HUN, PARK, NAM-WOO, PARK, KI-TACK
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS PRINTED CIRCUITS TESTING
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creator	SHIN, KI-HUN PARK, NAM-WOO PARK, KI-TACK
description	Disclosed is a prober having an independent modular cell structure. The prober having an independent modular cell structure according to one embodiment of the present invention may comprise: a prober stage chamber module to which a probe card and a wafer are supplied and in which the probe card and wafer are inspected; and an electrical module which is installed under the prober stage chamber module and supports the load of the prober stage chamber module thereon, and in which electrical equipment for power, control, and communication are installed.
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language	chi ; eng
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subjects	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS PRINTED CIRCUITS TESTING
title	Prober having independent modular cell structure
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