Bump forming device, bump forming method, solder ball repairing device and solder ball repairing method capable of inspecting bump defects generated on electrode pads of substrate and re-supplying and repairing solder balls in defective electrode portions for soldering
The purpose of the invention is to provide a highly reliable soldering device and method for forming ultrafine solder bump. The bump forming device of the present invention is a bump forming device for supplying solder balls on electrode pads formed on a substrate and comprises a plasma generating d...
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Format: | Patent |
Sprache: | chi ; eng |
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