Micromachining processing agent and micromachining processing method

Provided are: a micromachining processing agent that makes it possible to selectively perform micromachining of a silicon oxide film when performing micromachining of a layered film including at least a silicon nitride film, a silicon oxide film, and a silicon alloy film; and a micromachining proces...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKATA, NODOKA, HASEBE, RUI, NII, KEIICHI, DATE, KAZUYA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES SEMICONDUCTOR DEVICES
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