Reduced-pressure drying device and reduced-pressure drying method
The invention provides a reduced-pressure drying device and a reduced-pressure drying method, which can dry a solvent in a solution on a substrate in a short time. The reduced-pressure drying apparatus for drying a solution on a substrate in a reduced-pressure state comprises: a mounting table on wh...
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| creator | OIKAWA, JUNJI NASU, TOSHIFUMI UEDA, TOSHIHIKO OGURA, EIJI HAYASHI, TERUYUKI |
| description | The invention provides a reduced-pressure drying device and a reduced-pressure drying method, which can dry a solvent in a solution on a substrate in a short time. The reduced-pressure drying apparatus for drying a solution on a substrate in a reduced-pressure state comprises: a mounting table on which a substrate is mounted; a solvent collecting member having a plurality of through holes penetrating in the thickness direction, the solvent collecting member being provided so as to face the substrate mounted on the mounting table, and temporarily collecting a solvent in the solution vaporized from the substrate; a processing container, which is depressurizable, has a side wall surrounding the mounting table when viewed from the thickness direction, and contains the mounting table and the solvent collecting member; and a surrounding member that surrounds the solvent collecting member so as to be able to close the space between the solvent collecting member and the side wall of the processing container when view |
| format | Patent |
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The reduced-pressure drying apparatus for drying a solution on a substrate in a reduced-pressure state comprises: a mounting table on which a substrate is mounted; a solvent collecting member having a plurality of through holes penetrating in the thickness direction, the solvent collecting member being provided so as to face the substrate mounted on the mounting table, and temporarily collecting a solvent in the solution vaporized from the substrate; a processing container, which is depressurizable, has a side wall surrounding the mounting table when viewed from the thickness direction, and contains the mounting table and the solvent collecting member; and a surrounding member that surrounds the solvent collecting member so as to be able to close the space between the solvent collecting member and the side wall of the processing container when view</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; BLASTING ; DRYING ; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; SEMICONDUCTOR DEVICES ; WEAPONS</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220316&DB=EPODOC&CC=TW&NR=202211509A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220316&DB=EPODOC&CC=TW&NR=202211509A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OIKAWA, JUNJI</creatorcontrib><creatorcontrib>NASU, TOSHIFUMI</creatorcontrib><creatorcontrib>UEDA, TOSHIHIKO</creatorcontrib><creatorcontrib>OGURA, EIJI</creatorcontrib><creatorcontrib>HAYASHI, TERUYUKI</creatorcontrib><title>Reduced-pressure drying device and reduced-pressure drying method</title><description>The invention provides a reduced-pressure drying device and a reduced-pressure drying method, which can dry a solvent in a solution on a substrate in a short time. The reduced-pressure drying apparatus for drying a solution on a substrate in a reduced-pressure state comprises: a mounting table on which a substrate is mounted; a solvent collecting member having a plurality of through holes penetrating in the thickness direction, the solvent collecting member being provided so as to face the substrate mounted on the mounting table, and temporarily collecting a solvent in the solution vaporized from the substrate; a processing container, which is depressurizable, has a side wall surrounding the mounting table when viewed from the thickness direction, and contains the mounting table and the solvent collecting member; and a surrounding member that surrounds the solvent collecting member so as to be able to close the space between the solvent collecting member and the side wall of the processing container when view</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>BLASTING</subject><subject>DRYING</subject><subject>DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAMSk0pTU5N0S0oSi0uLi1KVUgpqszMS1dISS3LTE5VSMxLUSjCoSQ3tSQjP4WHgTUtMac4lRdKczMourmGOHvophbkx6cWFyQmp-allsSHhBsZGBkZGpoaWDoaE6MGADVFMio</recordid><startdate>20220316</startdate><enddate>20220316</enddate><creator>OIKAWA, JUNJI</creator><creator>NASU, TOSHIFUMI</creator><creator>UEDA, TOSHIHIKO</creator><creator>OGURA, EIJI</creator><creator>HAYASHI, TERUYUKI</creator><scope>EVB</scope></search><sort><creationdate>20220316</creationdate><title>Reduced-pressure drying device and reduced-pressure drying method</title><author>OIKAWA, JUNJI ; NASU, TOSHIFUMI ; UEDA, TOSHIHIKO ; OGURA, EIJI ; HAYASHI, TERUYUKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW202211509A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>BLASTING</topic><topic>DRYING</topic><topic>DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>OIKAWA, JUNJI</creatorcontrib><creatorcontrib>NASU, TOSHIFUMI</creatorcontrib><creatorcontrib>UEDA, TOSHIHIKO</creatorcontrib><creatorcontrib>OGURA, EIJI</creatorcontrib><creatorcontrib>HAYASHI, TERUYUKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OIKAWA, JUNJI</au><au>NASU, TOSHIFUMI</au><au>UEDA, TOSHIHIKO</au><au>OGURA, EIJI</au><au>HAYASHI, TERUYUKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Reduced-pressure drying device and reduced-pressure drying method</title><date>2022-03-16</date><risdate>2022</risdate><abstract>The invention provides a reduced-pressure drying device and a reduced-pressure drying method, which can dry a solvent in a solution on a substrate in a short time. The reduced-pressure drying apparatus for drying a solution on a substrate in a reduced-pressure state comprises: a mounting table on which a substrate is mounted; a solvent collecting member having a plurality of through holes penetrating in the thickness direction, the solvent collecting member being provided so as to face the substrate mounted on the mounting table, and temporarily collecting a solvent in the solution vaporized from the substrate; a processing container, which is depressurizable, has a side wall surrounding the mounting table when viewed from the thickness direction, and contains the mounting table and the solvent collecting member; and a surrounding member that surrounds the solvent collecting member so as to be able to close the space between the solvent collecting member and the side wall of the processing container when view</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS |
| title | Reduced-pressure drying device and reduced-pressure drying method |
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