Anomaly detection from aggregate statistics using neural networks

Implementations disclosed describe a method and a system to perform the method of obtaining a reduced representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system performing a manufacturing operation. The...

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Bibliographische Detailangaben
Hauptverfasser: ARMACOST, MICHAEL D, ISKANDAR, JIMMY
Format: Patent
Sprache:chi ; eng
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