Methods and apparatus for reducing defects in preclean chambers

Apparatus and methods use a unique process kit to protect a processing volume of a process chamber. The process kit includes a shield with a frame configured to be insertable into a shield and a foil liner composed of a metallic material that is attachable to the frame at specific points. The specif...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JUPUDI, ANANTHKRISHNA, WEI, JUN-QI, ZHANG, KANG, OW, YUEH SHENG, WADA, YUICHI, TEO, KOK SEONG, BABU, SARATH, TAN, KOK WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!