Image sensor with nanostructure-based capacitors

An image sensor comprising an image sensor layer having a plurality of image sensor layer contact pads; and a plurality of photo-sensitive elements, each being coupled to a respective image sensor layer contact pad; and a capacitor layer having: a plurality of first capacitor contact structures, eac...

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Hauptverfasser: TIVERMAN, OLA, KABIR, M SHAFIQUL, DESMARIS, VINCENT, JOHANSSON, ANDERS, AMIN SALEEM, MUHAMMAD, BYLUND, MARIA, MARKNAES, VICTOR, LUNDAHL, KARL, ANDERSSON, RICKARD
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creator TIVERMAN, OLA
KABIR, M SHAFIQUL
DESMARIS, VINCENT
JOHANSSON, ANDERS
AMIN SALEEM, MUHAMMAD
BYLUND, MARIA
MARKNAES, VICTOR
LUNDAHL, KARL
ANDERSSON, RICKARD
description An image sensor comprising an image sensor layer having a plurality of image sensor layer contact pads; and a plurality of photo-sensitive elements, each being coupled to a respective image sensor layer contact pad; and a capacitor layer having: a plurality of first capacitor contact structures, each being constituted by a capacitor layer top contact pad bonded to a respective image sensor layer contact pad of the image sensor layer; a plurality of second capacitor contact structures; and a plurality of capacitors, embedded in a first dielectric material, each capacitor including at least one electrically conductive vertical nanostructure electrically conductively connected to one of a respective first capacitor contact structure and a respective second capacitor contact structure, and conductively separated from the other one of the respective first capacitor contact structure and the respective second capacitor contact structure by a layer of a second dielectric material.
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language chi ; eng
recordid cdi_epo_espacenet_TW202201772A
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OR TREATMENT THEREOF
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
TRANSPORTING
title Image sensor with nanostructure-based capacitors
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