Particle beam apparatus and composite beam apparatus

Provided is a particle beam apparatus capable of performing appropriate switching selectively between charged particle beam and neutral particle beam. A particle beam column (19) includes an ion source (41), a condenser lens (52), a charge exchange grid (55), and an objective lens (56). The ion sour...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGAHARA, KOJI, MADOKORO, YUICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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