System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback

A system for analyzing one or more samples includes a sample analysis sub-system configured to perform one or more measurements on the one or more samples. The system further includes a controller configured to: receive design of experiment (DoE) data for performing the one or more measurements on t...

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Bibliographische Detailangaben

Hauptverfasser:	VOLKOVICH, ROIE, BENDAVID, NIR, MILO, RENAN, YAZIV, TAL, GOLOTSVAN, ANNA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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