Adhesive sheet and polishing pad with adhesive sheet

A purpose of the present invention is to provide an adhesive sheet which exhibits excellent shear strength and excellent slurry resistance at high temperatures, while having excellent releasability that enables peeling without adhesive residue. Another purpose of the present invention is to provide...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OGATA, YUDAI, KOGISO, TATSUYA, FUKUYAMA, KAZUYUKI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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