Member for semiconductor cleaning apparatus

To provide a member for a semiconductor cleaning apparatus that is resistant to thermal deformation and metal elution. The member for a semiconductor cleaning apparatus includes a prepreg in which carbon fiber and tetrafluoroethylene/perfluoro(alkyl vinyl ether) copolymer are thermally fused.

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Bibliographische Detailangaben
Hauptverfasser:	MASUI, TOSHIAKI, MURAKAMI, SHINJI, YUKAWA, HIROKAZU, HAGI, KEISUKE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	To provide a member for a semiconductor cleaning apparatus that is resistant to thermal deformation and metal elution. The member for a semiconductor cleaning apparatus includes a prepreg in which carbon fiber and tetrafluoroethylene/perfluoro(alkyl vinyl ether) copolymer are thermally fused.