Solid immersion lens unit and semiconductor inspection device

This solid immersion lens unit is provided with: a solid immersion lens; and a holder which holds the solid immersion lens such that the solid immersion lens is swingable. The solid immersion lens has: a first lens part which is made of a first material; and a second lens part which is made of a sec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKAMURA, TOMONORI, MAO, XIANG-GUANG, ARATA, IKUO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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