Pedestal setup using camera wafer

A method comprises arranging an apparatus on a top surface of a pedestal in a processing chamber. The apparatus comprises an annular member, N supporting members, and N pins, where N is an integer greater than two. The N supporting members support the annular member in a plane parallel to and above...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WOONPRASERT, BOONYARIT, TAN, TED TAI-DE, KRISHNASWAMY, VIVEKANANDAN, KULKARNI, PRASANNA, BATZER, RACHEL E, FIEDLER, SHAWN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING RECORD CARRIERS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS SEMICONDUCTOR DEVICES
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