Sample surface polarization modification in interferometric defect inspection

Defects are detected using data acquired from an interference channel and a polarization modification channel in an interferometer. The interference objective splits a polarized illumination beam into a reference illumination that is reflected by a reference surface without modification to the polar...

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Bibliographische Detailangaben

1. Verfasser:	SMITH, NIGEL P
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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