Oil pressure drive system and gate valve

The invention discloses an oil pressure drive system and a gate valve. The oil pressure drive system is an oil pressure drive system that can expand and contract so as to press an object in a chamberin a vacuum atmosphere. The oil pressure drive system has a vacuum actuator and an oil pressure drivi...

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Bibliographische Detailangaben
Hauptverfasser: SHIBAYAMA, KOUJI, SAKODA, SEIYA, SUZUKI, MIKIYA, WADA, SHINICHI, ISHIDA, TOMOYA, TOKUHIRA, SHINNOSUKE, TERUI, TAKAAKI, FURUSE, HARUKUNI, ENDO, JIROU, INOUE, HIDEAKI, WADE, TAKUYA
Format: Patent
Sprache:chi ; eng
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