Instant repair method of a polishing pad

An instant repair method of a polishing pad includes a trimming step, an inspection step, a reconstruction step, and an analysis step. The surface and appearance of the polishing pad are reconstructed according to an inspection of the polishing pad, and an analysis is performed according to the reco...

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Bibliographische Detailangaben
Hauptverfasser:	FU, YENI, LI, JENIEN, CHEN, CHUNN, WANG, CHUNG-WEI, LIN, JIAN-SHIAN, CHEN, CHAOANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS PHYSICS POLISHING SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR TRANSPORTING
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Beschreibung
Zusammenfassung:	An instant repair method of a polishing pad includes a trimming step, an inspection step, a reconstruction step, and an analysis step. The surface and appearance of the polishing pad are reconstructed according to an inspection of the polishing pad, and an analysis is performed according to the reconstruction to ensure that the surface of the polishing pad can recover its function after the surface of the polishing pad is repaired, so that the polishing pad can be used effectively to save costs.