Contamination trap

A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes com...

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Hauptverfasser:	WESTERLAKEN, JAN STEVEN CHRISTIAAN, DIRECKS, DANIEL JOZEF MARIA, HOEIJMAKERS, PIETER GERARDUS MATHIJS, VAN DRENT, WILLIAM PETER, MOORS, KATJA CORNELIA JOANNA CLASINA, DERKS, SANDER CATHARINA REINIER, NAVARRO PAREDES, VIOLETA, FEIJTS, MAURICE WILHELMUS LEONARDUS HENDRICUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
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