Contamination trap
A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes com...
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| creator | WESTERLAKEN, JAN STEVEN CHRISTIAAN DIRECKS, DANIEL JOZEF MARIA HOEIJMAKERS, PIETER GERARDUS MATHIJS VAN DRENT, WILLIAM PETER MOORS, KATJA CORNELIA JOANNA CLASINA DERKS, SANDER CATHARINA REINIER NAVARRO PAREDES, VIOLETA FEIJTS, MAURICE WILHELMUS LEONARDUS HENDRICUS |
| description | A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m-1 K-1. |
| format | Patent |
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wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m-1 K-1.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE |
| title | Contamination trap |
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