Reduced-pressure drying apparatus and method for manufacturing solvent collecting member comprising a solvent collecting member that includes a plurality of solvent collecting and dividing members that are formed in a plate shape having a plurality of openings

An object of the present invention is to provide a reduced-pressure drying apparatus that allows solvent to be uniform in a plane in a dried condition even for a large-sized substrate. The solution of the present invention is a reduced-pressure drying apparatus that allows solvent on a substrate to be dried in a reduced pressure and is characterized by comprising a container that receives the substrate; a carrier table that is arranged inside the container to carry the substrate; and a solvent collecting member that is disposed inside the container in a manner of being opposite to the substrate that is carried by the carrier table to temporarily collect solvent contained in a solution and evaporating from the substrate. The solvent collecting member comprises: a plurality of solvent collecting and dividing members that are formed in a plate shape having a plurality of openings such that a side end of each of the plurality of solvent collecting and dividing members is connected to each other in a top plane vie