FOUP cleaning device and FOUP cleaning method

FOUP cleaning device and FOUP cleaning method

The present invention is directed to providing a front opening unified pod (FOUP) cleaning device capable of improving cleaning and drying efficiency for a FOUP body and a FOUP cover and a FOUP cleaning method. To this end, the FOUP cleaning device for cleaning a FOUP including a FOUP body and a FOU...

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Hauptverfasser: HUR, DONG-GEUN, JUNG, DONG-KEUN, KWEON, OH-HYEONG, PARK, YOUNG-SOO
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator HUR, DONG-GEUN
JUNG, DONG-KEUN
KWEON, OH-HYEONG
PARK, YOUNG-SOO
description The present invention is directed to providing a front opening unified pod (FOUP) cleaning device capable of improving cleaning and drying efficiency for a FOUP body and a FOUP cover and a FOUP cleaning method. To this end, the FOUP cleaning device for cleaning a FOUP including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber. The FOUP cleaning method for cleaning a FOUP including a FOUP body and a FOUP cover includes loading the FOUP on a loading and unloading part; transporting the loaded FOUP to a standby part; transporting the FOUP body and the FOUP cover transported to the standby
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title FOUP cleaning device and FOUP cleaning method
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