Gas apparatus, systems, and methods for chamber ports

An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MOREY, TRAVIS, SICO, ANGELA R, DECOTTIGNIES, ROBERT IRWIN, NGUYEN, ANDREW, KUCHAR, MICHAEL, DISANTO, MITCHELL, REUTER, PAUL B, MADIWAL, NAGENDRA V
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!