Equipment front end module gas recirculation

Equipment front end module gas recirculation

Disclosed are methods and apparatuses for recirculating gas in an equipment front end module ("EFEM"), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.

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Bibliographische Detailangaben
Hauptverfasser: LOPES, TODD ANTHONY, AGUILAR AMAYA, SILVIA ROCIO, GOULD, RICHARD HOWARD, WONG, SCOTT VERNON, SENN, BRANDON LEE, KELLER, JAMES DONALD, WASSEI, PETER R, PRACKO, STEVEN EDMUND
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Disclosed are methods and apparatuses for recirculating gas in an equipment front end module ("EFEM"), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.