Particle removal apparatus and associated system

An apparatus for removing particles from a clamp, the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion, a supporting portion, at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BALTIS, COEN HUBERTUS MATHEUS, VAN GILS, PETRUS JACOBUS MARIA, VAN DEN OEVER, PETRUS JOHANNES, VAN DUIVENBODE, JEROEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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