Pressure-reduction unit equipped with heater, and battery manufacturing equipment

A pressure-reduction unit 1 equipped with a heater for carrying out, in a reduced-pressure processing chamber 4, pressure-reduction thermal processing on a substrate 17 to which a liquid material has been applied, wherein multiple support pins 16, which are capable of supporting from below the subst...

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Bibliographische Detailangaben
Hauptverfasser:	NAKATANI, HIDEYUKI, HOSOKAWA, TOMOKO, MASUNARI, SEIJI, IKEGAMI, TAKAHIRO, BABA, MAMORU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRICITY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A pressure-reduction unit 1 equipped with a heater for carrying out, in a reduced-pressure processing chamber 4, pressure-reduction thermal processing on a substrate 17 to which a liquid material has been applied, wherein multiple support pins 16, which are capable of supporting from below the substrate 17 present in the reduced-pressure processing chamber 4, are erected and secured at fixed positions, and the multiple support pins 16 are inserted respectively into multiple through-holes formed in a heater plate 12 containing a heater, thereby holding the heater plate 12 so as to be capable of moving up and down.