Pickup device and pickup method
The present invention comprises: a stage (20) that includes a suction surface (22) that suctions a sheet (12); a push-up member (30) that pushes up the sheet (12); and a three-way valve (67) that switches the opening pressure of an opening (23) between a first pressure that is near a vacuum and a se...
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| creator | NAGANO, KAZUAKI |
| description | The present invention comprises: a stage (20) that includes a suction surface (22) that suctions a sheet (12); a push-up member (30) that pushes up the sheet (12); and a three-way valve (67) that switches the opening pressure of an opening (23) between a first pressure that is near a vacuum and a second pressure that is near atmospheric pressure. When a semiconductor die (15) is picked up together with a viscoelastic film (11), the opening pressure is caused to vibrate at a prescribed frequency that corresponds to the viscoelastic characteristics of the viscoelastic film (11) when the suction pressure of the suction surface (22) is set at a third pressure that is near a vacuum, and the sheet (12) is pushed up by the push-up member (30). A thin semiconductor die affixed to the surface of the sheet by the viscoelastic film is thereby picked up from the surface of the sheet together with the viscoelastic film. |
| format | Patent |
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When a semiconductor die (15) is picked up together with a viscoelastic film (11), the opening pressure is caused to vibrate at a prescribed frequency that corresponds to the viscoelastic characteristics of the viscoelastic film (11) when the suction pressure of the suction surface (22) is set at a third pressure that is near a vacuum, and the sheet (12) is pushed up by the push-up member (30). 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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS COMBINED OPERATIONS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OTHER WORKING OF METAL PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING UNIVERSAL MACHINE TOOLS |
| title | Pickup device and pickup method |
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