Ozone gas concentration method and ozone gas concentration device

Provided are an ozone gas concentration method and an ozone gas concentration device (1) using same, said ozone gas concentration method comprising: a step in which a mixed raw material gas containing ozone gas is guided inside an adsorption vessel (20) holding an adsorption agent that adsorbs ozone...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAKIHIRA, NAOHISA, NAKAMURA, SADAKI, IZUMI, KOICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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