Device inspection circuit, device inspection device, and probe card

Provided is a device inspection circuit capable of measuring the current flowing through multiple devices without raising cost. A power supply circuit 27 of a box-side inspection circuit 21 is provided with an operational amplifier 29 and a sense resistor 30; connects, in series and in the following...

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Bibliographische Detailangaben
1. Verfasser:	NARIKAWA, KENICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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