Flow ratio control device, program for flow ratio control device, and flow ratio control method

To provide a flow ratio control device with which it is possible, not only to achieve a target flow ratio, but also to control the time required to achieve the target flow ratio, provided is a flow ratio control device, comprising: a main flow path; a plurality of branch flow paths which branch from...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GUNDLACH, MAXIMILIAN MARTIN, YASUDA, TADAHIRO, LOWERY, PATRICK ALLEN, EBERT, BRIAN JAMES, DICK, JOHN THOMAS, WHITE, WILLIAM WYLIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROLLING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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