Flow ratio control device, program for flow ratio control device, and flow ratio control method
To provide a flow ratio control device with which it is possible, not only to achieve a target flow ratio, but also to control the time required to achieve the target flow ratio, provided is a flow ratio control device, comprising: a main flow path; a plurality of branch flow paths which branch from...
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| creator | GUNDLACH, MAXIMILIAN MARTIN YASUDA, TADAHIRO LOWERY, PATRICK ALLEN EBERT, BRIAN JAMES DICK, JOHN THOMAS WHITE, WILLIAM WYLIE |
| description | To provide a flow ratio control device with which it is possible, not only to achieve a target flow ratio, but also to control the time required to achieve the target flow ratio, provided is a flow ratio control device, comprising: a main flow path; a plurality of branch flow paths which branch from a terminal end of the main flow path; a plurality of fluid control devices which are disposed upon each of the branch flow paths, and each of which comprises a valve and a pressure-type flow sensor which is positioned to the downstream side of the valve; and an operation setting unit which, on the basis of a target flow ratio, sets one of the fluid control devices from among the plurality of fluid control devices to operate in a flow speed control mode for controlling a flow speed of a fluid to the upstream side of each of the valves, and sets the other fluid control devices to operate in a flow rate control mode for controlling the flow rate on the basis of a target flow rate. |
| format | Patent |
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| subjects | CONTROLLING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING |
| title | Flow ratio control device, program for flow ratio control device, and flow ratio control method |
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