Inspection jig, substrate inspection apparatus having the same, and method for manufacturing inspection jig

An inspection jig of this invention is an inspection jig for bringing a probe Pr into contact with an inspection point provided on a substrate to be inspected, the inspection jig including an inspection side support member having an opposing plate 51 provided with an opposing surface F arranged to o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMASAKI, HIDEKAZU, OTA, NORIHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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