Inspection jig, substrate inspection apparatus having the same, and method for manufacturing inspection jig
An inspection jig of this invention is an inspection jig for bringing a probe Pr into contact with an inspection point provided on a substrate to be inspected, the inspection jig including an inspection side support member having an opposing plate 51 provided with an opposing surface F arranged to o...
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| creator | YAMASAKI, HIDEKAZU OTA, NORIHIRO |
| description | An inspection jig of this invention is an inspection jig for bringing a probe Pr into contact with an inspection point provided on a substrate to be inspected, the inspection jig including an inspection side support member having an opposing plate 51 provided with an opposing surface F arranged to oppose to the substrate, and an electrode side support member 6 having support plates 61 to 63 arranged to oppose to an electrode plate 9 located in the side opposite to the opposing surface F of the opposing plate 51, the support plates 61 to 63 being provided with probe support holes 23 allowing a rear end portion of the probe Pr to be inserted and supporting it, the probe support holes 23 being formed along a supporting line V inclined at a fixed angle [theta] with respect to a reference line Z in a direction orthogonal to the opposing surface F of the opposing plate 51, and having a restricting surface for restricting the movement of the rear end portion of the probe Pr in a direction orthogonal to the inclining |
| format | Patent |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | Inspection jig, substrate inspection apparatus having the same, and method for manufacturing inspection jig |
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