Non-contact temperature measurement by dual-wavelength shift in brewster's angle
Embodiments disclosed herein relate to a thermal processing chamber having a substrate monitoring system. In one embodiment, a temperature monitoring system is disclosed herein. The temperature monitoring system includes a housing and a window defining an interior volume, one or more light sources,...
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| creator | APURVA, NAMAN MOFFITT, THEODORE P |
| description | Embodiments disclosed herein relate to a thermal processing chamber having a substrate monitoring system. In one embodiment, a temperature monitoring system is disclosed herein. The temperature monitoring system includes a housing and a window defining an interior volume, one or more light sources, a camera, a polarizer, a collimator, a first mirror, and a second mirror. The one or more light sources are disposed in the interior volume. The camera is configured to capture a plurality of frames of one or more light beams. The polarizer is disposed in an optical path of the one or more light beams. The first mirror is configured to reflect light directed by the collimator towards a bottom surface of a substrate such that the beam creates an angle of incidence equal to a Brewster's angle. The second mirror is configured to direct the one or more light beams to the camera. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW201805604A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW201805604A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW201805604A3</originalsourceid><addsrcrecordid>eNqNyrsKwkAQBdA0FqL-w1hZLcQntiKKlVgELMMkuXnAZnbZnRj8ey38AKvTnGnyuDsxpRPlUknRewTWIYB6cPzaQ5SKN1UDWzPyCxbSaEux7WqlTqgIGKMirCKxNBbzZFKzjVj8nCXL6yU73wy8yxE9lxBonj036fqY7g_p7rT953wA3L433g</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Non-contact temperature measurement by dual-wavelength shift in brewster's angle</title><source>esp@cenet</source><creator>APURVA, NAMAN ; MOFFITT, THEODORE P</creator><creatorcontrib>APURVA, NAMAN ; MOFFITT, THEODORE P</creatorcontrib><description>Embodiments disclosed herein relate to a thermal processing chamber having a substrate monitoring system. In one embodiment, a temperature monitoring system is disclosed herein. The temperature monitoring system includes a housing and a window defining an interior volume, one or more light sources, a camera, a polarizer, a collimator, a first mirror, and a second mirror. The one or more light sources are disposed in the interior volume. The camera is configured to capture a plurality of frames of one or more light beams. The polarizer is disposed in an optical path of the one or more light beams. The first mirror is configured to reflect light directed by the collimator towards a bottom surface of a substrate such that the beam creates an angle of incidence equal to a Brewster's angle. The second mirror is configured to direct the one or more light beams to the camera.</description><language>chi ; eng</language><subject>COLORIMETRY ; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT ; MEASURING ; MEASURING QUANTITY OF HEAT ; MEASURING TEMPERATURE ; PHYSICS ; RADIATION PYROMETRY ; TESTING ; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180216&DB=EPODOC&CC=TW&NR=201805604A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180216&DB=EPODOC&CC=TW&NR=201805604A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>APURVA, NAMAN</creatorcontrib><creatorcontrib>MOFFITT, THEODORE P</creatorcontrib><title>Non-contact temperature measurement by dual-wavelength shift in brewster's angle</title><description>Embodiments disclosed herein relate to a thermal processing chamber having a substrate monitoring system. In one embodiment, a temperature monitoring system is disclosed herein. The temperature monitoring system includes a housing and a window defining an interior volume, one or more light sources, a camera, a polarizer, a collimator, a first mirror, and a second mirror. The one or more light sources are disposed in the interior volume. The camera is configured to capture a plurality of frames of one or more light beams. The polarizer is disposed in an optical path of the one or more light beams. The first mirror is configured to reflect light directed by the collimator towards a bottom surface of a substrate such that the beam creates an angle of incidence equal to a Brewster's angle. The second mirror is configured to direct the one or more light beams to the camera.</description><subject>COLORIMETRY</subject><subject>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</subject><subject>MEASURING</subject><subject>MEASURING QUANTITY OF HEAT</subject><subject>MEASURING TEMPERATURE</subject><subject>PHYSICS</subject><subject>RADIATION PYROMETRY</subject><subject>TESTING</subject><subject>THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyrsKwkAQBdA0FqL-w1hZLcQntiKKlVgELMMkuXnAZnbZnRj8ey38AKvTnGnyuDsxpRPlUknRewTWIYB6cPzaQ5SKN1UDWzPyCxbSaEux7WqlTqgIGKMirCKxNBbzZFKzjVj8nCXL6yU73wy8yxE9lxBonj036fqY7g_p7rT953wA3L433g</recordid><startdate>20180216</startdate><enddate>20180216</enddate><creator>APURVA, NAMAN</creator><creator>MOFFITT, THEODORE P</creator><scope>EVB</scope></search><sort><creationdate>20180216</creationdate><title>Non-contact temperature measurement by dual-wavelength shift in brewster's angle</title><author>APURVA, NAMAN ; MOFFITT, THEODORE P</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW201805604A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2018</creationdate><topic>COLORIMETRY</topic><topic>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</topic><topic>MEASURING</topic><topic>MEASURING QUANTITY OF HEAT</topic><topic>MEASURING TEMPERATURE</topic><topic>PHYSICS</topic><topic>RADIATION PYROMETRY</topic><topic>TESTING</topic><topic>THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR</topic><toplevel>online_resources</toplevel><creatorcontrib>APURVA, NAMAN</creatorcontrib><creatorcontrib>MOFFITT, THEODORE P</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>APURVA, NAMAN</au><au>MOFFITT, THEODORE P</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Non-contact temperature measurement by dual-wavelength shift in brewster's angle</title><date>2018-02-16</date><risdate>2018</risdate><abstract>Embodiments disclosed herein relate to a thermal processing chamber having a substrate monitoring system. In one embodiment, a temperature monitoring system is disclosed herein. The temperature monitoring system includes a housing and a window defining an interior volume, one or more light sources, a camera, a polarizer, a collimator, a first mirror, and a second mirror. The one or more light sources are disposed in the interior volume. The camera is configured to capture a plurality of frames of one or more light beams. The polarizer is disposed in an optical path of the one or more light beams. The first mirror is configured to reflect light directed by the collimator towards a bottom surface of a substrate such that the beam creates an angle of incidence equal to a Brewster's angle. The second mirror is configured to direct the one or more light beams to the camera.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS RADIATION PYROMETRY TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR |
| title | Non-contact temperature measurement by dual-wavelength shift in brewster's angle |
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