Delivery container with flow distributor
Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be...
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| creator | BAILEY, WADE HAMPTON NEHLSEN, JAMES PATRICK BIRTCHER, CHARLES MICHAEL IVANOV, SERGEI VLADIMIROVICH KANG, KAI STEIDL, THOMAS ANDREW |
| description | Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW201742674A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW201742674A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW201742674A3</originalsourceid><addsrcrecordid>eNrjZNBwSc3JLEstqlRIzs8rSczMSy1SKM8syVBIy8kvV0jJLC4pykwqLckv4mFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8SHhRgaG5iZGZuYmjsbEqAEABpYo-w</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Delivery container with flow distributor</title><source>esp@cenet</source><creator>BAILEY, WADE HAMPTON ; NEHLSEN, JAMES PATRICK ; BIRTCHER, CHARLES MICHAEL ; IVANOV, SERGEI VLADIMIROVICH ; KANG, KAI ; STEIDL, THOMAS ANDREW</creator><creatorcontrib>BAILEY, WADE HAMPTON ; NEHLSEN, JAMES PATRICK ; BIRTCHER, CHARLES MICHAEL ; IVANOV, SERGEI VLADIMIROVICH ; KANG, KAI ; STEIDL, THOMAS ANDREW</creatorcontrib><description>Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.</description><language>chi ; eng</language><subject>BLASTING ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES ; FIXED-CAPACITY GAS-HOLDERS ; HEATING ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; LIGHTING ; MECHANICAL ENGINEERING ; METALLURGY ; STORING OF DISTRIBUTING GASES OR LIQUIDS ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES ; WEAPONS</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171216&DB=EPODOC&CC=TW&NR=201742674A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171216&DB=EPODOC&CC=TW&NR=201742674A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BAILEY, WADE HAMPTON</creatorcontrib><creatorcontrib>NEHLSEN, JAMES PATRICK</creatorcontrib><creatorcontrib>BIRTCHER, CHARLES MICHAEL</creatorcontrib><creatorcontrib>IVANOV, SERGEI VLADIMIROVICH</creatorcontrib><creatorcontrib>KANG, KAI</creatorcontrib><creatorcontrib>STEIDL, THOMAS ANDREW</creatorcontrib><title>Delivery container with flow distributor</title><description>Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.</description><subject>BLASTING</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES</subject><subject>FIXED-CAPACITY GAS-HOLDERS</subject><subject>HEATING</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>METALLURGY</subject><subject>STORING OF DISTRIBUTING GASES OR LIQUIDS</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNBwSc3JLEstqlRIzs8rSczMSy1SKM8syVBIy8kvV0jJLC4pykwqLckv4mFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8SHhRgaG5iZGZuYmjsbEqAEABpYo-w</recordid><startdate>20171216</startdate><enddate>20171216</enddate><creator>BAILEY, WADE HAMPTON</creator><creator>NEHLSEN, JAMES PATRICK</creator><creator>BIRTCHER, CHARLES MICHAEL</creator><creator>IVANOV, SERGEI VLADIMIROVICH</creator><creator>KANG, KAI</creator><creator>STEIDL, THOMAS ANDREW</creator><scope>EVB</scope></search><sort><creationdate>20171216</creationdate><title>Delivery container with flow distributor</title><author>BAILEY, WADE HAMPTON ; NEHLSEN, JAMES PATRICK ; BIRTCHER, CHARLES MICHAEL ; IVANOV, SERGEI VLADIMIROVICH ; KANG, KAI ; STEIDL, THOMAS ANDREW</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW201742674A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2017</creationdate><topic>BLASTING</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES</topic><topic>FIXED-CAPACITY GAS-HOLDERS</topic><topic>HEATING</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>METALLURGY</topic><topic>STORING OF DISTRIBUTING GASES OR LIQUIDS</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>BAILEY, WADE HAMPTON</creatorcontrib><creatorcontrib>NEHLSEN, JAMES PATRICK</creatorcontrib><creatorcontrib>BIRTCHER, CHARLES MICHAEL</creatorcontrib><creatorcontrib>IVANOV, SERGEI VLADIMIROVICH</creatorcontrib><creatorcontrib>KANG, KAI</creatorcontrib><creatorcontrib>STEIDL, THOMAS ANDREW</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BAILEY, WADE HAMPTON</au><au>NEHLSEN, JAMES PATRICK</au><au>BIRTCHER, CHARLES MICHAEL</au><au>IVANOV, SERGEI VLADIMIROVICH</au><au>KANG, KAI</au><au>STEIDL, THOMAS ANDREW</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Delivery container with flow distributor</title><date>2017-12-16</date><risdate>2017</risdate><abstract>Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
| recordid | cdi_epo_espacenet_TW201742674A |
| source | esp@cenet |
| subjects | BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY STORING OF DISTRIBUTING GASES OR LIQUIDS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS |
| title | Delivery container with flow distributor |
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