Polishing pad, polishing method using the polishing pad, and using method of the same eliminating or reducing the pre-polishing time to realize simplified polishing
Provided is a polishing pad including a resin foaming body composed of thermoplastic resin, capable of eliminating or reducing pre-polishing time to realize simplified polishing. Moreover, the polishing having efficiency and high reliability can be possible by continuously performing the polishing c...
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| creator | YAMAMOTO, SHUNJI MASUDA, MITSUO YOKOTA, NOBUTOSHI KUBOTA, TETSUHARU TODA, SADAYUKI |
| description | Provided is a polishing pad including a resin foaming body composed of thermoplastic resin, capable of eliminating or reducing pre-polishing time to realize simplified polishing. Moreover, the polishing having efficiency and high reliability can be possible by continuously performing the polishing continuously with excellent polishing speed during initial stage, and re-polishing is also excellent. The polishing pads (1, 2) are composed of a high-rigidity thermoplastic hard resin foaming body having a three-dimensional structure, wherein the three-dimensional air chamber structure is formed by a plurality of air chambers and cell walls that partition the cells to enable it to have mutually independent partitioning. The polishing pad is a structural body as following: the mechanical characteristic of the wall part of the cell wall is configured as a value represented by the mechanical characteristic of a resin sheet before foaming, wherein the tensile strength is 50 MPa to 90 MPa, the bending strength is 90 MPa |
| format | Patent |
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Moreover, the polishing having efficiency and high reliability can be possible by continuously performing the polishing continuously with excellent polishing speed during initial stage, and re-polishing is also excellent. The polishing pads (1, 2) are composed of a high-rigidity thermoplastic hard resin foaming body having a three-dimensional structure, wherein the three-dimensional air chamber structure is formed by a plurality of air chambers and cell walls that partition the cells to enable it to have mutually independent partitioning. The polishing pad is a structural body as following: the mechanical characteristic of the wall part of the cell wall is configured as a value represented by the mechanical characteristic of a resin sheet before foaming, wherein the tensile strength is 50 MPa to 90 MPa, the bending strength is 90 MPa</description><language>chi ; eng</language><subject>DRESSING OR CONDITIONING OF ABRADING SURFACES ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; PERFORMING OPERATIONS ; POLISHING ; TOOLS FOR GRINDING, BUFFING, OR SHARPENING ; TRANSPORTING</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170501&DB=EPODOC&CC=TW&NR=201714704A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170501&DB=EPODOC&CC=TW&NR=201714704A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAMAMOTO, SHUNJI</creatorcontrib><creatorcontrib>MASUDA, MITSUO</creatorcontrib><creatorcontrib>YOKOTA, NOBUTOSHI</creatorcontrib><creatorcontrib>KUBOTA, TETSUHARU</creatorcontrib><creatorcontrib>TODA, SADAYUKI</creatorcontrib><title>Polishing pad, polishing method using the polishing pad, and using method of the same eliminating or reducing the pre-polishing time to realize simplified polishing</title><description>Provided is a polishing pad including a resin foaming body composed of thermoplastic resin, capable of eliminating or reducing pre-polishing time to realize simplified polishing. Moreover, the polishing having efficiency and high reliability can be possible by continuously performing the polishing continuously with excellent polishing speed during initial stage, and re-polishing is also excellent. The polishing pads (1, 2) are composed of a high-rigidity thermoplastic hard resin foaming body having a three-dimensional structure, wherein the three-dimensional air chamber structure is formed by a plurality of air chambers and cell walls that partition the cells to enable it to have mutually independent partitioning. 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Moreover, the polishing having efficiency and high reliability can be possible by continuously performing the polishing continuously with excellent polishing speed during initial stage, and re-polishing is also excellent. The polishing pads (1, 2) are composed of a high-rigidity thermoplastic hard resin foaming body having a three-dimensional structure, wherein the three-dimensional air chamber structure is formed by a plurality of air chambers and cell walls that partition the cells to enable it to have mutually independent partitioning. The polishing pad is a structural body as following: the mechanical characteristic of the wall part of the cell wall is configured as a value represented by the mechanical characteristic of a resin sheet before foaming, wherein the tensile strength is 50 MPa to 90 MPa, the bending strength is 90 MPa</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING |
| title | Polishing pad, polishing method using the polishing pad, and using method of the same eliminating or reducing the pre-polishing time to realize simplified polishing |
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