A filter, method of formation thereof, and an image sensor

A method of forming a radiation filter for use in a lithographic system comprises obtaining a filter body and forming at least one structure in or on the body, wherein the at least one structure provides a filtering effect and least one of (a), (b), (c) or (d): - (a) the at least one structure compr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KLUGKIST, JOOST ANDRE, BEARDA, JELTE RIENTS, VOOGD, ROBBERT JAN, PANITZ, MEIK, TAUBERT, JOCHEN, HERGENHAN, GUIDO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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