Method of measuring thickness of thin film

Disclosed is a method of measuring thickness of a thin film, the method comprising the operations of: acquiring reflectance, supposing the refraction, performing conversion, determining an error, extracting a phase, restoring the phase and calculating the thickness. In the operation of acquiring ref...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PAHK, HEUI-JAE, KIM, KWANG-RAK, KWON, SOON-YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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