Pattern measurement device and computer program

The present invention is: a pattern measurement device that, regardless of increased fineness, deviation, or the like of a pattern, accurately and stably performs a measurement on the basis of an edge identification or a pattern or edge judgment; and a computer program. The pattern measurement devic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAMAI, HITOSHI, YAMAZAKI, TOMOAKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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