Semiconductor device models including re-usable sub-structures

Methods and tools for generating measurement models of complex device structures based on re-useable, parametric models are presented. Metrology systems employing these models are configured to measure structural and material characteristics associated with different semiconductor fabrication proces...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LAFFIN, MATTHEW A, ILORETA, JONATHAN, POSLAVSKY, LEONID, KAACK, TORSTEN, LEE, LIE-QUAN, ZHAO, QIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!