Apparatus for aligning a substrate

An apparatus (100) for aligning a substrate (200) is disclosed. The apparatus includes: two or more conveying units (120), each conveying unit (120) comprising two or more supporting elements (130, 140, 150, 160, 170, 180, 190, 195, 199) configured to rotate about a first rotation axis (400) to conv...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	PASQUALIN, GIANFRANCO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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