Test apparatus and test method for acoustic micro-device

A test apparatus for acoustic micro-device includes acoustic device, at least one device under test (DUT), and a supporting plate. The acoustic device provides an acoustic source. The supporting plate has a first surface having a chamber indent into the supporting plate and a second surface having a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSAO, LII, LEE, CHIEN-HSING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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