Test apparatus and test method for acoustic micro-device
A test apparatus for acoustic micro-device includes acoustic device, at least one device under test (DUT), and a supporting plate. The acoustic device provides an acoustic source. The supporting plate has a first surface having a chamber indent into the supporting plate and a second surface having a...
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| creator | TSAO, LII LEE, CHIEN-HSING |
| description | A test apparatus for acoustic micro-device includes acoustic device, at least one device under test (DUT), and a supporting plate. The acoustic device provides an acoustic source. The supporting plate has a first surface having a chamber indent into the supporting plate and a second surface having a supporting space indent into the supporting plate to support the DUT. The supporting plated further has a main channel to connect the chamber and the DUT and at least one side channel directly or through the main channel to connect the chamber and the supporting space. The acoustic source is provided to a first surface of the DUT through the main channel and to a second surface of the DUT through the side channel. A cover unit covers on the supporting plate. The supporting space and the chamber together are a sealed space, and the DUT is in the sealed space. |
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The acoustic device provides an acoustic source. The supporting plate has a first surface having a chamber indent into the supporting plate and a second surface having a supporting space indent into the supporting plate to support the DUT. The supporting plated further has a main channel to connect the chamber and the DUT and at least one side channel directly or through the main channel to connect the chamber and the supporting space. The acoustic source is provided to a first surface of the DUT through the main channel and to a second surface of the DUT through the side channel. A cover unit covers on the supporting plate. The supporting space and the chamber together are a sealed space, and the DUT is in the sealed space.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING PHYSICS TESTING |
| title | Test apparatus and test method for acoustic micro-device |
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