Apparatus and method for cross-flow purge for optical components in a chamber

An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROSE, GARRY, DELGADO, GILDARDO, LARSON, H. STEVEN, HENNIGAN, DANIEL R
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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