Efficient material handling in semiconductor wafer processing

An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated ANHS is configured to transport wafer c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ADEL, MICHAEL, WIDMANN, AMIR, SEKULA, PATI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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