Aluminum prototype for stamper and manufacturing method thereof, stamper and manufacturing method thereof, manufacturing method of article, and anti-reflective product

In an aluminum prototype which is used in manufacturing a stamper that has a fine concave-convex structure thereof and which contains aluminum and magnesium, the aluminum prototype for the stamper is used, in which the amount of the magnesium is 0.1% by mass to 3% by mass, the amount of silicon is 1...

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Hauptverfasser: KOJIMA, KATSUHIRO, MOCHIZUKI, KAZUME, ONOMOTO, HIROSHI, SHIRAI, KOTA, OKADA, HIROSHI, KITA, HIROAKI
Format: Patent
Sprache:chi ; eng
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